What purification equipment is needed for clean rooms in the semiconductor industry?
2024.07.02
Cleanrooms in the semiconductor industry require specialized purification equipment to maintain the stringent environmental conditions necessary for the production of high-quality semiconductor devices. Here is a list of essential purification equipment used in these clean rooms:
- HEPA/ULPA Filters:
- Air Showers:
- Fan Filter Units (FFUs):
- Laminar Flow Workstations:
- Chemical Fume Hoods:
- Gas Purifiers:
- Ionization Equipment:
- Deionized Water Systems:
- Particle Counters:
- Humidity and Temperature Control Systems:
- Vacuum Systems:
- Clean Room Garments:
- Surface Purifiers:
- HEPA Vacuum Cleaners:
These components work together to ensure the clean room environment meets the stringent cleanliness standards required in the semiconductor industry.
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