Construction Process of Clean Rooms for Quantum Chip Manufacturing
2025.01.02
In the era of rapid technological development, quantum chips, as core components in the cutting - edge technology field, have extremely strict requirements for the manufacturing environment. Guangzhou Cleanroom Construction Co., Ltd., a professional manufacturer of purification equipment with years of experience in the industry, will reveal the construction process of clean rooms for quantum chip manufacturing today.
1. Pre - project Planning and Requirement Analysis
The first step in building a clean room for quantum chips is of great significance. It is necessary to have an in - depth understanding of every link in the chip manufacturing process. From chip lithography, etching, deposition to packaging and other processes, different steps have different requirements for environmental parameters such as temperature, humidity, number of dust particles, and electrostatic control. Communicate closely with chip manufacturing enterprises. Based on their production scale and technical routes, accurately determine the area and layout of the workshop, and plan the flow directions of personnel, materials, and products to ensure that the three flows do not interfere with each other and avoid cross - contamination, laying a solid foundation for efficient production in the future.
2. Determination of Purification Level
Quantum chip manufacturing usually requires an extremely high purification level, commonly ISO Class 3 or even higher. This means that the number of dust particles larger than 0.1 micrometers per cubic meter of air must be strictly controlled to single - digit numbers. According to the precision of the chip manufacturing process, determine the purification levels of different areas such as the lithography area and the ultra - clean testing area, so as to configure purification equipment targeted, ensuring that the chip is not disturbed by dust impurities at the micro - level and guaranteeing the chip yield rate.
3. Architectural Structure Design
The architectural structure of the workshop must be adapted to the purification requirements. The walls, floors, and ceilings should be made of air - tight, smooth, easy - to - clean, and anti - static materials. Color - coated steel plates can be selected for the walls, with seamless joints; epoxy self - leveling can be used for the floor, which is wear - resistant, corrosion - resistant, and anti - static; the ceiling is designed to be accessible for people, which is convenient for later equipment maintenance. High - efficiency particulate air (HEPA) filters and ultra - low - penetration air (ULPA) filters are installed to ensure uniform air supply and stable and long - lasting purification effects.
4. Selection and Installation of Air Purification System
This is the core link, consisting of air - conditioning units, supply and return air ducts, filters, etc. The air - conditioning unit should have multiple functions such as refrigeration, heating, humidification, dehumidification, and air filtration, accurately regulating the temperature and humidity with a very small error range. The supply and return air ducts are reasonably planned according to the layout of the workshop, and high - quality galvanized steel sheets are used to ensure air - tightness and prevent air leakage from causing purification failure. Filters at all levels work step by step. The primary filter removes large - particle dust, the medium - efficiency filter further purifies the air, and the high - efficiency and ultra - high - efficiency filters provide an almost sterile and dust - free ultra - clean air for the chip manufacturing area.
5. Electrostatic and Micro - vibration Control
Quantum chips are extremely sensitive to static electricity. A small electrostatic discharge can damage the chip. Professional electrostatic elimination equipment such as ion fans and electrostatic grounding systems are equipped in the workshop to ensure that the electrostatic potential is within the safe threshold. At the same time, considering the micro - vibrations generated by equipment operation and personnel movement, shock - absorbing designs are adopted from the building foundation, and shock - absorbing pads are also equipped for equipment installation to prevent the micro - vibrations from being transmitted and affecting the accuracy of precision processes such as chip lithography.
6. Supporting of Water, Electricity, and Gas Systems
A stable and reliable supply of water, electricity, and gas is the guarantee for the operation of the workshop. The pure water system provides high - purity water sources for chip manufacturing, meeting the needs of processes such as cleaning and etching, and the water quality reaches the standard of electronic - grade ultrapure water. The power system adopts a dual - circuit power supply, equipped with an uninterruptible power supply (UPS) to deal with sudden power outages and ensure the continuous operation of key equipment. The gas system accurately distributes special gases such as nitrogen and argon. The pipelines are strictly sealed and purged to prevent gas contamination from affecting the chip quality.
7. Equipment Installation and Commissioning
Purification equipment and production equipment are installed in sequence. They should be installed in strict accordance with installation specifications to ensure that the equipment is level, stable, and tightly connected. After installation, joint commissioning is carried out. Simulate the production conditions, comprehensively test the purification effect, temperature and humidity control, and equipment interlocking, and repeatedly adjust the parameters until all indicators meet the design requirements, creating a perfect manufacturing environment for the formal production of quantum chips.
Guangzhou Cleanroom Construction Co., Ltd., with its professional team and advanced technology, controls every detail of the construction process of clean rooms for quantum chips, helping quantum technology enterprises to reach a higher level and embark on a new journey of quantum chip mass production. If you have requirements for the construction of clean rooms, please feel free to contact us. Let's work together to create a technological future!
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