In the semiconductor field, a technological revolution driven by new materials is surging forward. Deep blue gallium oxide, as a highly promising "rising star" among them, has opened up new paths for the research and development of high-performance semiconductor devices with its excellent properties. However, to transform it from laboratory achievements into large-scale industrial production, a dust-free clean room that suits its characteristics is essential. Guangzhou Kunling Purification Equipment Co., Ltd., which has been deeply involved in the purification industry for many years, will take you to comprehensively understand the key points in the construction of dust-free clean rooms for deep blue gallium oxide semiconductors today.

The production process of deep blue gallium oxide semiconductors is extremely sensitive to impurities such as dust and microorganisms. In key processes such as wafer manufacturing, lithography, and etching, even tiny particles "mixed in" can cause short circuits in chips, performance degradation, and a significant reduction in the yield rate. Therefore, the purification level of the workshop usually needs to reach Class 10 or even higher standards. This means that the number of dust particles with a particle size greater than 0.5 micrometers in each cubic meter of air is strictly controlled within 10. Guangzhou Kunling adopts international leading air filtration technologies. From primary filtration to intercept large particles of dust, to medium-efficiency filtration to capture medium-sized impurities, and then through high-efficiency particulate air filters (HEPA) and ultra-low penetration air filters (ULPA) for layer-by-layer "screening", it ensures that the air entering the workshop is almost free of impurities, laying a pure foundation for precision production.

The electrical properties and crystal structure stability of gallium oxide semiconductor materials vary significantly under different temperature and humidity environments. The suitable temperature range is usually locked between 22 °C and 25 °C, and the humidity is maintained at 40% - 50% relative humidity (RH). The workshop is equipped with an intelligent temperature and humidity control system. Through high-precision sensors that monitor environmental data in real time, it links with air conditioners, humidifiers, and dehumidifiers to respond and adjust quickly. When the temperature soars in hot summer days, the refrigeration module operates efficiently to cool down; when it is dry in winter, the humidifying equipment sprays precisely to increase humidity, creating a constant temperature and humidity "microclimate" to keep the gallium oxide materials and equipment in the best working condition and reduce the risk of process deviations.

In semiconductor processing, static electricity is a "hidden killer". The circuits of deep blue gallium oxide chips are fine, and the discharge phenomenon caused by static electricity can easily break down transistors and damage chips. The floor materials are made of anti-static PVC or epoxy self-leveling flooring, with the surface resistance strictly controlled within the range of 10^6 - 10^9 ohms to quickly dissipate static electricity. Equipment and workbenches are equipped with static eliminators, and ion fans continuously blow out positive and negative ions to neutralize charges. Operators wear anti-static work clothes and shoe covers, being fully "armed" to eliminate the hidden dangers of static electricity accumulation and discharge from the source and protect the integrity of products.

Good ventilation in the workshop can not only ensure fresh air but also help exhaust process waste gas and dissipate heat for cooling. For specific processes in gallium oxide production, a combination of unidirectional flow and turbulent flow air distribution forms is adopted. In the lithography area, vertical unidirectional flow with a stable flow rate (0.3 - 0.5 meters per second) precisely carries dust out; in areas such as material storage and assembly, turbulent flow ventilation is set up to efficiently replace the air. The materials for ventilation ducts are selected considering fire prevention, rust prevention, and low air leakage rates. Fans are accurately selected according to the scale of the workshop and the frequency of air changes to ensure that the air volume and air pressure are suitable and maintain the orderly flow of air and dilute the concentration of harmful substances.

The preparation process of deep blue gallium oxide is complex, and lithography machines, etching machines, chemical vapor deposition equipment, etc. vary in size, weight, and have special requirements for vibration during operation and heat dissipation. The layout of the workshop adheres to the principle of "smooth process flow and non-interference between equipment". Different functional areas are divided, and heavy equipment is placed in areas with good load-bearing and excellent shock absorption. Heat dissipation channels are reserved and cooling devices are installed according to the heat dissipation curves of the equipment. The intervals between adjacent equipment are reasonable to facilitate maintenance, operation, and debugging, enabling efficient linkage of equipment and stable production of high-quality semiconductor products.

People are a key factor in the operation of the workshop, but they are also a potential source of pollution. Personnel entering the dust-free clean room for deep blue gallium oxide need to go through a strict dressing process, from air shower dust removal to wearing sterile protective clothing, masks, and gloves, layer by layer for cleaning. Professional training is regularly carried out to strengthen employees' knowledge of semiconductor processes, operation norms in clean rooms, and the ability to respond to emergencies. New employees are given practical guidance by experienced colleagues to master the details of material handling and equipment operation, reducing the probability of product contamination and damage caused by human errors.

Engaging in the construction of dust-free clean rooms for deep blue gallium oxide semiconductors is both a challenge and an opportunity. Guangzhou Cleanroom Construction Co., Ltd. relies on its rich project experience, professional technical team, and high-quality purification products to customize one-stop solutions throughout the process. From preliminary planning, construction to later operation and maintenance, we will make precise efforts to help enterprises seize the high ground in the deep blue gallium oxide industry. If you are planning such a workshop project or have questions about construction details, please feel free to contact us immediately and let's work together to create a new model of clean semiconductor manufacturing.