Semiconductor Cleanroom's Central Air Conditioning Power Selection
2024.10.08
In the field of semiconductor manufacturing, the environmental requirements of cleanrooms are extremely stringent. As a key equipment for maintaining the constant temperature, humidity, and cleanliness of cleanrooms, the power selection of central air conditioning is of crucial importance.
I. Special Requirements of Semiconductor Cleanrooms
Semiconductor cleanrooms have strict standards for air cleanliness, temperature, humidity, and air flow velocity.
- Cleanliness: Tiny dust particles can have a fatal impact on semiconductor chips. Therefore, the air cleanliness of cleanrooms usually needs to reach a specific level. This requires central air conditioning to have an efficient filtration system.
- Temperature control: The semiconductor production process has extremely high requirements for temperature stability. Generally, the temperature needs to be controlled within a very precise range, usually ±0.1°C or even higher precision. This requires central air conditioning to be able to provide a stable cold and heat source and have precise temperature regulation capabilities.
- Humidity control: Appropriate humidity is also crucial for semiconductor production. Too high or too low humidity can affect the performance and quality of chips. Generally, the humidity in cleanrooms needs to be controlled at around 40% - 60%. Central air conditioning needs to have precise humidity regulation functions.
- Air flow velocity: Reasonable air flow velocity can ensure uniform air distribution and at the same time avoid the accumulation and flying of dust particles. Central air conditioning needs to be able to provide stable air flow to meet the air flow velocity requirements of cleanrooms.
II. Consideration Factors for Central Air Conditioning Power Selection
- Workshop area and height
- Cleanliness requirements
- Temperature and humidity control requirements
- Equipment and personnel heat dissipation
- Future development needs
III. How to Correctly Select Central Air Conditioning Power
- Conduct professional load calculation
- Refer to similar project experience
- Select reliable brands and suppliers
- Conduct trial operation and debugging
In conclusion, the power selection of central air conditioning for semiconductor cleanrooms is a complex and important task. It is necessary to comprehensively consider the special requirements of the workshop, the influence of various factors, conduct professional load calculations, refer to similar project experience, select reliable brands and suppliers, and conduct trial operation and debugging. Only in this way can a central air conditioner with appropriate power be selected to provide a stable and reliable environmental guarantee for semiconductor production.
Guangzhou Kunling Purification Equipment Co., Ltd. focuses on the field of purification equipment and provides you with professional semiconductor cleanroom solutions to make your production environment cleaner, more stable and more efficient.
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